Table of contents

ABSTRACT . i

ACKNOWLEDGMENTS ii

Table of contents iv

List of figures vi

List of tables viii

CHAPTER 1. INTRODUCTION 1

1.1 Piezoelectricity 2

1.1.1 Piezoelectric effect 2

1.1.2 Lead zirconate titanate (PZT) . 3

1.2 Piezoelectric MEMS inkjet print head . 5

1.3 Numerical simulation 7

1.3.1 Role of numerical simulation 7

1.3.2 General principle of numerical simulation . 8

1.3.3 Numerical simulations of piezoelectric MEMS inkjet with CFD-ACE+ 9

1.4 References . 10

CHAPTER 2. NUMERICAL AND EXPERIMENTAL STUDY ON ACTUATOR PERFORMANCE

OF PIEZOELECTRIC MEMS INKJET PRINT HEAD 11

2.1 Introduction . 12

2.2 Modeling and simulation settings 13

2.3 Experimental procedure . 16

2.4 Results and discussion . 17

2.4.1 Performance characteristics of PIPH actuator in air . 17

2.4.2 Performance characteristics of PIPH actuator in liquid 18

2.5 Conclusion . 20

2.6 References . 21

CHAPTER 3. SIMULATION OF MICRODROP GENERATION IN PIEZOELETRIC MEMS

INKJET PRINT HEAD 26

3.1 Introduction . 27

3.2 Modeling and simulation settings 27

3.3 Results and discussion . 29

3.3.1 Microdrop generation process . 29

3.3.2 Effect of actuating characteristics . 29

3.3.3 Effect of fluid properties . 30

3.3.4 Effect of geometrical parameters 32

3.4. Conclusion 32

3.5 References . 34

CHAPTER 4. FABRICATION AND CHARACTERIZATION OF PIEZOELECTRIC MEMS

INKJET PRINT HEAD 38

4.1 Introduction . 39

4.2 Experiments . 39

4.3 Results and discussion . 41

4.4 Conclusion . 42

4.5 Rerefences . 44

CHAPTER 5. CONCLUSION AND SUGGESTION . 50

5.1 Conclusion . 50

5.2 Suggestion (new design) 50

Appendix A. Python Source Script for simulation of microdroplet generation (effects of

driving characteristics and fluid properties) . 52

Appendix B. Pattern conditions for fabrication of Inkjetver2 . 54

Appendix C. Dry etching conditions . 5